language
Product Introduction Product Specifications 相关案例

Product Introduction

A POI (Piezoelectric on Insulator) substrate achieved by mechanically thinning the surface LN/LT layer of a multilayer bonded substrate to the nanometer level through specialized processing methods. Primarily applied in 5G/6G (high-end SAW filters), optical communications (thin-film electro-optic modulators), sensors, and other fields.

Product Specifications

Project Specifications
film material Acoustic-grade lithium niobate/lithium tantalate Optical-grade lithium niobate/lithium tantalate
Film thickness 600nm
Film Layer TTV ≤40nm
Bend ≤ 15μm
Warpage ≤20μm
Roughness ≤0.2nm
DDP ≤3%

relevant cases

More cases