A high-precision wafer frequency tester designed for magazine-fed operation, featuring automatic loading, visual positioning, frequency testing, and automatic unloading. The machine also meets Class 100 cleanroom requirements.
● Contact-based frequency detection.
● Utilizes the 250C-2 dual-channel frequency test system.
● Fully automated testing based on two sets of left-right distributed probes.
● Achieves high-precision, high-throughput, and highly reliable unattended automated testing, generating wafer test maps.
● Compact size, space-saving design, and easy equipment installation.
● Ultra-wide frequency measurement range from 1 MHz to 400 MHz.
● Ultra-small gap measurement down to 0.4mm.
| Project | Specifications |
|---|---|
| Equipment Model | JYPLJCJ3.0.4 |
| Compatibility with Wafer Size | 2-inch/3-inch/4-inch, other sizes available upon request |
| Frequency measurement range | 1Mhz ~ 400Mhz※1(※1 Higher frequency testing can be achieved by replacing the measuring instrument.) |
| Repeatability | <30ppm |
| Measurement time | Single blank test time < 0.6 seconds |
| measuring instruments | 250C |
| 名称 | Automatic Mapping System |
| Sample Stage Method | X-Y Stage |
| Optics Department | Measurement Probe CCD Camera |
| Maximum Wafer Size | Less than 150mm |
| Wafer Angle Compensation | There is |
| Pattern Alignment | There is |
| Equipment Dimensions | 1000mm×900mm×2000mm |
| Equipment Weight | 750kg |
