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Product Introduction Product Specifications 相关案例

Product Introduction

A Piezoelectric on Insulator (POI) substrate achieved by mechanically thinning the surface LN/LT layer of a multilayer bonded substrate to the micrometer level through specialized processing methods. Primarily applied in 5G/6G (high-end SAW filters), optical communications (thin-film electro-optic modulators), sensors, and other fields.


Product Specifications

Project Specifications
film material Acoustic-grade lithium niobate/lithium tantalate Optical-grade lithium niobate/lithium tantalate
Film thickness 10μm
TTV ≤1μm
LTV ≤500nm
PLTV ≥95%
BOW ≤ 15μm
Warpage ≤20μm
Roughness < 0.5nm
DDP ≤3%

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