Used as a substrate for optical coatings or in the production of micro-optical components, integrated optics, and photonic chips.
| Project | Specifications |
|---|---|
| External Dimensions | Φ100-200 ±0.1 mm |
| Thickness | ≥0.5 mm ±0.01 mm |
| Roughness | ≤1 nm |
| Bend | ≤10 μm |
| Thickness Tolerance | ≤2 μm |
| Warpage | ≤15 μm |
| Surface finish | 10-5 |